Nanolithography and manipulation of graphene using an atomic force microscope

Details Nanolithography and manipulation of graphene using an atomic force microscope Nanolithography and manipulation of graphene using an atomic force microscope

2008-06-04

arxiv.org/abs/0806.0716v2

Solid State Communications 147. 366-369 (2008)

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

11 pages text, 5 figures

Scientific paper

10.1016/j.ssc.2008.06.027

We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possibility of tabletop graphene based device fabrication. Trench sizes of less than 30 nm in width are attainable with this technique. Besides oxidation we also show the influence of mechanical peeling and scratching with an AFM of few layer graphene sheets placed on different substrates.

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