Multidomain lithium niobate microcantilever for smart biosensor

Details Multidomain lithium niobate microcantilever for smart biosensor Multidomain lithium niobate microcantilever for smart biosensor

2007-12-11

arxiv.org/abs/0712.1623v1

Physics

Condensed Matter

Materials Science

8 pages, 4 figures

Scientific paper

Fabrication of the bimorph lithium niobate cantilevers involves a micro machining of a z-cut wafer to create a multidomain structure. After etching, the bimorph ferroelectric cantilevers are fabricated at the locations near interdomain walls. Cantilever vibrations are excited by rf voltage due to piezoelectric effect in a ferroelectric chip, and optical detection is employed to pickup the vibrations. The self-assembling layers of two different Silanes are chemically deposited on the micro cantilevers. The layers are detected independently by two methods including a low frequency shift of cantilever natural vibrations, and Raman spectral lines from the Silane layers. Possible applications include smart biosensors in a real time domain.

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