Morphological and Structural Characterization of Cro2/Cr2o3 Films Grown by Laser-CVD

Details Morphological and Structural Characterization of Cro2/Cr2o3 Films Grown by Laser-CVD Morphological and Structural Characterization of Cro2/Cr2o3 Films Grown by Laser-CVD

2006-05-24

arxiv.org/abs/cond-mat/0605592v1

Applied Surface Science 247 (2005) 423

Physics

Condensed Matter

Materials Science

17 pages, 4 figures

Scientific paper

10.1016/j.apsusc.2005.01.061

This work reports on the synthesis of chromium (III, IV) oxides films by KrF laser-assisted CVD. Films were deposited onto sapphire substrates at room temperature by photodissociation of Cr(CO)6 in dynamic atmospheres containing oxygen and argon. A study of the processing parameters has shown that partial pressure ratio of O2 to Cr(CO)6 and laser fluence are the prominent parameters that have to be accurately controlled in order to co-deposit both crystalline oxide phases. Films consistent with such a two-phase system were synthesised for a laser fluence of 75 mJ cm-2 and a partial pressure ratio about 1. PACS: 81.15.Fg, 81.15.Kk, 81.05.Je

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