Minimal resonator loss for circuit quantum electrodynamics

Physics – Condensed Matter – Mesoscale and Nanoscale Physics

Scientific paper

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4 pages, 3 figures

Scientific paper

10.1063/1.3458705

Single photon level quality factors of 500x10^3 are shown in NbTiN
superconducting resonators at millikelvin temperatures. This result originates
from the intrinsic low dielectric loss of NbTiN, as demonstrated by comparison
with Ta, and by removing unnecessary parts of the dielectric substrate.

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