Physics – Condensed Matter – Mesoscale and Nanoscale Physics
Scientific paper
2010-05-03
Appl. Phys. Lett. 97, 023508 (2010)
Physics
Condensed Matter
Mesoscale and Nanoscale Physics
4 pages, 3 figures
Scientific paper
10.1063/1.3458705
Single photon level quality factors of 500x10^3 are shown in NbTiN
superconducting resonators at millikelvin temperatures. This result originates
from the intrinsic low dielectric loss of NbTiN, as demonstrated by comparison
with Ta, and by removing unnecessary parts of the dielectric substrate.
Barends Rami
Baselmans J. J. A.
de Visser P. J.
Diener Peter
Endo Akira
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