Physics – Condensed Matter – Materials Science
Scientific paper
2010-10-21
Physics
Condensed Matter
Materials Science
Accepted for publication in Journal of Applied Physics
Scientific paper
Epitaxial growth of Ba0.6Sr0.4Ti1-xZrxO3 (0/leqx\leq0.3) composition spread thin film library on SrRuO3/SrTiO3 layer by combinatorial pulsed laser deposition (PLD) is reported. X-ray diffraction and energy dispersive x-ray spectroscopy studies showed an accurate control of the film phase and composition by combinatorial PLD. A complex evolution of the microstructure and morphology with composition of the library is described, resulting from the interplay between epitaxial stress, increased chemical pressure and reduced elastic energy upon Zr doping. Statistical and temperature-related capacitive measurements across the library showed unexpected variations of the dielectric properties. Doping windows with enhanced permittivity and tunability are identified, and correlated to microstructural properties.
Autret-Lambert Cécile
Gervais Francois
Gervais Monique
Liu Guozhen
Roger Sylvain
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