Micro-fabrication of Carbon Structures by Pattern Miniaturization in Resorcinol-Formaldehyde Gel

Details Micro-fabrication of Carbon Structures by Pattern Miniaturization in Resorcinol-Formaldehyde Gel Micro-fabrication of Carbon Structures by Pattern Miniaturization in Resorcinol-Formaldehyde Gel

2010-09-20

arxiv.org/abs/1009.3703v1

C. S. Sharma, A. Verma, M. M. Kulkarni, D. K. Upadhyay and A. Sharma, ACS Applied Materials and Interfaces 2010, 2, 2193-2197

Physics

Condensed Matter

Soft Condensed Matter

16 pages, 5 figures

Scientific paper

10.1021/am100512c

A simple and novel method to fabricate and miniaturize surface and sub-surface micro-structures and micro-patterns in glassy carbon is proposed and demonstrated. An aqueous resorcinol-formaldehyde (RF) sol is employed for micro-molding of the master-pattern to be replicated, followed by controlled drying and pyrolysis of the gel to reproduce an isotropically shrunk replica in carbon. The miniaturized version of the master-pattern thus replicated in carbon is about one order of magnitude smaller than original master by repeating three times the above cycle of molding and drying. The micro-fabrication method proposed will greatly enhance the toolbox for a facile fabrication of a variety of Carbon-MEMS and C-microfluidic devices.

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