Micro-column Scanning Electron Microscope and X-ray Spectrometer (MSEMS) for Planetary Exploration

Details Micro-column Scanning Electron Microscope and X-ray Spectrometer (MSEMS) for Planetary Exploration Micro-column Scanning Electron Microscope and X-ray Spectrometer (MSEMS) for Planetary Exploration

Dec 2009

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2009agufm.p43a1421r&link_type=abstract

American Geophysical Union, Fall Meeting 2009, abstract #P43A-1421

Biology

[0406] Biogeosciences / Astrobiology And Extraterrestrial Materials, [3672] Mineralogy And Petrology / Planetary Mineralogy And Petrology, [5220] Planetary Sciences: Astrobiology / Hydrothermal Systems And Weathering On Other Planets, [6297] Planetary Sciences: Solar System Objects / Instruments And Techniques

Scientific paper

Scanning Electron Microscopy combined with electron-induced X-ray Fluorescence Spectroscopy (SEM-EDX) is one of the most powerful techniques for characterizing sub-µm surface morphology and composition. In terrestrial laboratories, SEM-EDX is used to elucidate natural processes such as low-temperature diagenesis, thermal or pressure induced metamorphism, volcanism/magmatism, atmosphere/crust interaction and biological activity. Such information would be highly useful for investigating the natural history of the terrestrial planets, satellites and primitive bodies, providing morphological and elemental information that is 2 orders of magnitude higher in resolution than optical techniques. Below we describe the development of a Micro-column Scanning Electron Microscope and X-ray Spectrometer (MSEMS) for flight. The enabling technology of the MSEMS is a carbon nanotube field emission (CNTFE) electron source that is integrated with micro-electro-mechanical-systems (MEMS) - based electron gun and electron optical structures. A hallmark of CNTFE electron sources is their low chromatic aberration, which reduces the need for high accelerating voltages to obtain small spot size. The CNTFE also offers exceptional brightness and nanometer source size, eliminating the need for condenser lenses, making simple electrostatic focusing optics possible. Moreover, the CNT field emission gun (CFEG) at low operating voltage dissipates 103 less power than thermally-assisted Schottky emitters. A key feature of the MSEMS design is the lack of scanning coils. Rather, a piezoelectric sample stage capable of sub-nanometer resolution scans the sample past the fixed crossover of the MSEMS electron beam. We will describe a MEMS-based templating technique for fabricating mechanically and electrically stable miniature CFEGs. Using existing silicon (Si) technology, we fabricated highly controlled and precise MEMS structures for both the CNT cathode and focusing optics for the micro-column. The reproducibility of anisotropic wet etching enables precise alignment of the CNT tip with the electron extracting first anode in a gun configuration by using an interlocking templating technique. The CFEG can be fully integrated with a MEMS-based microcolumn. Extensive electron trajectory analysis using Lorentz 2D/3D software demonstrates that 10-nm imaging resolution at 5 keV is achievable with a 10-mm working distance from a column measuring just 16 mm in length. We will present the design of the microcolumn as well as the MEMS fabrication process. We have also tested a piezoelectric scanning stage inside a laboratory SEM with a fixed electron beam. Additional, we implemented our own LabVIEW software interface for controlling the stage and for enabling communication with the secondary electron detector for image formation. SEM micrographs obtained employing this novel technique will be presented.

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