Physics – Condensed Matter – Materials Science
Scientific paper
2007-09-12
Dans Proceedings of 12th International Workshop on Thermal investigations of ICs - THERMINIC 2006, Nice : France (2006)
Physics
Condensed Matter
Materials Science
Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
Scientific paper
Thermoreflectance methods by picosecond pulse heating and by nanosecond pulse heating have been developed under the same geometrical configuration as the laser flash method by the National Metrology Institute of JAPAN, AIST. Using these light pulse heating methods, thermal diffusivity of each layer of multilayered thin films and boundary thermal resistance between the layers can be determined from the observed transient temperature curves based on the response function method. The measurement results of various thin films as transparent conductive films used for flat panel displays, hard coating films and multilayered films of the next generation phase-change optical disk will be presented.
Baba Takayasu
Ishikawa Kaoru
Taketoshi N.
Yagi Takehiko
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