Low-loss superconducting resonant circuits using vacuum-gap-based microwave components

Details Low-loss superconducting resonant circuits using vacuum-gap-based microwave components Low-loss superconducting resonant circuits using vacuum-gap-based microwave components

2009-10-27

arxiv.org/abs/0910.5252v2

APPLIED PHYSICS LETTERS 96, 093502 (2010)

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

8 pages, 4 figures

Scientific paper

10.1063/1.3304168

We have produced high-quality complex microwave circuits, such as multiplexed resonators and superconducting phase qubits, using a "vacuum-gap" technology that eliminates lossy dielectric materials. We have improved our design and fabrication strategy beyond our earlier work, leading to increased yield, enabling the realization of these complex circuits. We incorporate both novel vacuum-gap wiring crossovers (VGX) for gradiometric inductors and vacuum-gap capacitors(VGC) on chip to produce resonant circuits that have large internal quality factors (30,000

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