Physics – Condensed Matter – Materials Science
Scientific paper
2008-12-17
Journal of Crystal Growth 311, 3771 (2009)
Physics
Condensed Matter
Materials Science
16 pages, 3 figures
Scientific paper
10.1016/j.jcrysgro.2009.05.011
We report on growth-mode transitions in the growth of SrRuO3 thin films on atomically flat Ti4+ single-terminated SrTiO3 (111) substrates, investigated by reflection high-energy electron diffraction and atomic force microscopy. Over the first ~9 unit cells, the dominant growth mode changes from island to layer-by-layer for the growth rate of 0.074 unit cells/sec and the growth temperature of 700 C. Moreover, in the course of growing SrRuO3 films, the governing growth mode of interest can be manipulated by changing the growth temperature and the growth rate, which change allows for the selection of the desired layer-by-layer mode. The present study thus paves the way for integrations of SrRuO3 thin layers into (111)-orientated oxide heterostructures, and hence multi-functional devices, requiring control of the sharp atomic-level interfaces and the layer-by-layer growth mode.
Chang Jaewan
Kim Sang-Koog
Lee Jong-Woo
Park Yoon-Seok
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