Large-scale defect accumulations in Czochralski-grown silicon

Details Large-scale defect accumulations in Czochralski-grown silicon Large-scale defect accumulations in Czochralski-grown silicon

2011-06-06

arxiv.org/abs/1106.1202v1

Silicon'96, Proc. 5-th Scientific and Business Conf., Roznov pod Radhostem, Czech Republic, 5-8 November 1996, ed. K. Vojtecho

Physics

Condensed Matter

Materials Science

Silicon'96, 5-th Scientific and Business Conf., Roznov pod Rad-hostem, Czech Republic, 5-8 November 1996

Scientific paper

Czochralski-grown silicon crystals were studied by the techniques of the low-angle mid-IR-light scattering and electron-beam-induced current. The large-scale accumulations of electrically-active impurities detected in this material were found to be different in their nature and formation mechanisms from the well-known impurity clouds in a FZ-grown silicon. A classification of the large-scale impurity accumulations in CZ Si is made and point centers constituting them are analyzed in this paper. A model of the large-scale impurity accumulations in CZ-grown Si is also proposed. In addition, the images of the large-scale impurity accumulations obtained by means of the scanning mid-IR-laser microscopy are demonstrated.

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