Ion beam shaping and downsizing of nanostructures

Details Ion beam shaping and downsizing of nanostructures Ion beam shaping and downsizing of nanostructures

2008-01-16

arxiv.org/abs/0801.2515v1

Nanotechnology 19 055301 (2008)

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

14 pages, 6 figures

Scientific paper

We report a new approach for progressive and well-controlled downsizing of nanostructures below the 10 nm scale. Low energetic ion beam (Ar+) is used for gentle surface erosion, progressively shrinking the dimensions with ~ 1 nm accuracy. The method enables shaping of nanostructure geometry and polishing the surface. The process is clean room / high vacuum compatible being suitable for various applications. Apart from technological advantages, the method enables study of various size phenomena on the same sample between sessions of ion beam treatment.

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