Interface roughness characterization using x-ray standing waves

Details Interface roughness characterization using x-ray standing waves Interface roughness characterization using x-ray standing waves

Feb 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2011..420k&link_type=abstract

Proc. SPIE Vol. 2011, p. 420-426, Multilayer and Grazing Incidence X-Ray/EUV Optics II, Richard B. Hoover; Arthur B. Walker; Eds

Physics

Optics

Scientific paper

An X-ray standing wave technique was used to characterize the interface roughness of multilayer structures. Standing wave fields of X-rays in multilayers are described in terms of a modified optical matrix. To include the interface roughness effect, Fresnel reflectance and transmittance coefficients in the matrix were modified. A Ni/C multilayer with about 54 angstroms periods was analyzed by X-ray diffraction and by the X-ray standing wave technique. The ratio between second and third Bragg reflection peaks suggested an expansion of nickel layer thickness. The X-ray standing wave measurement showed a reduction of nickel layer density, suggesting the diffusion of nickel atoms and formation of nickel-carbon complex. Interface roughness was estimated to be about 10 angstroms from the calculation at 85% bulk density of nickel, suggesting the diffusion of nickel.

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