Physics – Condensed Matter – Materials Science
Scientific paper
2009-09-09
Physics
Condensed Matter
Materials Science
24 pages, 8 figures, submitted to Ferroelectrics
Scientific paper
The application of a substrate bias during rf magnetron sputtering alters the crystalline structure, grain morphology, lattice strain and composition of BaxSr1-xTiO3 thin films. As a result, the dielectric properties of Pt/BaxSr1-xTiO3/Pt parallel-plate capacitors change significantly. With increasing substrate bias we observe a clear shift of the ferroelectric to paraelectric phase transition towards higher temperature, an increase of the dielectric permittivity and tunability at room temperature, and a deterioration of the dielectric loss. To a large extent these changes correlate to a gradual increase of the tensile in-plane film strain with substrate bias and an abrupt change in film composition.
Dijken Sebastiaan van
Kostamo Pasi
Riekkinen Tommi
Saijets Jan
Sajavaara Timo
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