Physics – Optics
Scientific paper
Jul 1989
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1160..217z&link_type=abstract
Conference on X-Ray/EUV Optics for Astronomy and Microscopy, p. 217 - 228
Physics
Optics
2
Coatings: X-Ray Telescopes
Scientific paper
In this paper, a detailed physical optics (interference and diffraction) treatment of surface scatter phenomena due to optical fabrication errors in X-ray/EUV multilayers over the entire relevant range of spatial frequencies is described. The effects on the scattered radiation field of a variety of assumptions concerning the statistical correlation of interface roughness will be explored. It is well known that, at soft X-ray wavelengths, substrate figure errors blur the image. It will be shown that uncorrelated interface microroughness reduces the reflectance of multilayers in addition to causing wide angle scatter, and that small-angle scatter from mid spatial frequency optical fabrication errors limits the achievable image quality (fractional encircled energy.)
Harvey James E.
Moran Edward C.
Zmek William P.
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