Physics – Condensed Matter – Materials Science
Scientific paper
2005-01-28
IEEE Trans. Nanotechnology Vol. 4 (5), pp.481--489, 2005
Physics
Condensed Matter
Materials Science
26 pages, 12 figures, accepted for IEEE Trans. Nanotechnology
Scientific paper
10.1109/TNANO.2005.851427
State-of-the-art carbon nanotube field-effect transistors (CNFETs) behave as Schottky barrier (SB)-modulated transistors. It is known that vertical scaling of the gate oxide significantly improves the performance of these devices. However, decreasing the oxide thickness also results in pronounced ambipolar transistor characteristics and increased drain leakage currents. Using a novel device concept, we have fabricated high-performance, enhancement-mode CNFETs exhibiting n or p-type unipolar behavior, tunable by electrostatic and/or chemical doping, with excellent OFF-state performance and a steep subthreshold swing (S =63 mV/dec). The device design allows for aggressive oxide thickness and gate length scaling while maintaining the desired device characteristics.
Appenzeller Joerg
Avouris Phaedon
Knoch Joachim
Lin Yu-Ming
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