Formation and Thermal Stability of sub-10 nm Carbon Templates on Si(100)

Details Formation and Thermal Stability of sub-10 nm Carbon Templates on Si(100) Formation and Thermal Stability of sub-10 nm Carbon Templates on Si(100)

2004-04-21

arxiv.org/abs/cond-mat/0404505v1

Physics

Condensed Matter

Materials Science

13 pages, 4 figures

Scientific paper

10.1063/1.1794369

We report a lithographic process for creating high-resolution (<10 nm) carbon templates on Si(100). A scanning electron microscope, operating under low vacuum (10E-6 mbar), produces a carbon-containing deposit ("contamination resist") on the silicon surface via electron-stimulated dissociation of ambient hydrocarbons, water and other adsorbed molecules. Subsequent annealing at temperatures up to 1320 K in ultra-high vacuum removes SiO2 and other contaminants, with no observable change in dot shape. The annealed structures are compatible with subsequent growth of semiconductors and complex oxides. Carbon dots with diameter as low as 3.5 nm are obtained with a 200 us electron-beam exposure time.

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