Flexural Plate Wave Devices Fabricated from Silicon Carbide Membranes

Details Flexural Plate Wave Devices Fabricated from Silicon Carbide Membranes Flexural Plate Wave Devices Fabricated from Silicon Carbide Membranes

2002-05-15

arxiv.org/abs/cond-mat/0205318v1

Physics

Condensed Matter

Materials Science

Scientific paper

Flexural Plate Wave (FPW) devices fabricated from Silicon Carbide (SiC) membranes are presented here which exhibit electrical and mechanical characteristics in its transfer functions that makes it very useful as a low voltage probe device capable of functioning in small areas that are commonly inaccessible to ordinary devices. The low input impedance characteristic of this current driven device makes it possible for it to operate at very low voltages, thereby reducing the hazards for flammable or explosive areas to be probed. The Flexural Plate Wave (FPW) devices are of a family of gravimetric type sensors that permit direct measurements of the mass of the vibrating element. The primary objective was to study the suitability of Silicon Carbide (SiC) membranes as a replacement of Silicon Nitride (SiN) membrane in flexural plate wave devices developed by Sandia National Laboratories

Affiliated with

Also associated with

No associations

Rating

Flexural Plate Wave Devices Fabricated from Silicon Carbide Membranes does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Flexural Plate Wave Devices Fabricated from Silicon Carbide Membranes, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flexural Plate Wave Devices Fabricated from Silicon Carbide Membranes will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-489131