Physics – Condensed Matter – Materials Science
Scientific paper
2010-10-06
Physics
Condensed Matter
Materials Science
16 pages, 8 figures. Submitted to Journal of Micromechanics and Microengineering
Scientific paper
We fabricated highly adherent and electrically conductive micropatterns on SU-8 by supersonic cluster beam deposition (SCBD). This technique is based on the acceleration of neutral metallic nanoparticles produced in the gas phase. The kinetic energy acquired by the nanoparticles allows implantation in a SU-8 layer, thus producing a metal-polymer nanocomposite thin layer. The nanocomposite shows ohmic electrical conduction and it can also be used as an adhesion layer for further metallization with a metallic overlayer. We characterized the electrical conduction, adhesion and biocompatibility of microdevices obtained by SCBD on SU-8 demonstrating the compatibility of our approach with standard lift off technology on 4" wafer. A self-standing and flexible Micro Electrode Array has been produced. Cytological tests with neuronal cell lines demonstrated an improved cell growth and a spontaneous confinement of cells on the nanocomposite layer.
Collini Cristian
Corbelli Gabriele
Divitini Giorgio
Ghisleri Cristian
Gianfelice Antonella
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