Physics – Condensed Matter – Materials Science
Scientific paper
2009-11-28
Physics
Condensed Matter
Materials Science
20 pages, 5 figures. Submitted to Journal of Applied Physics
Scientific paper
Ti/Al multilayer thin films with precise thickness have been deposited using a combination of dc and rf magnetron sputtering techniques. Cross-sectional transmission electron microscopy (TEM) revealed unmixed fifteen parallel and alternate layers of Ti and Al with sharp interfaces, each measuring 27 nm and 15 nm in thickness, respectively. The Ti layer was composed of hcp and fcc phases while the Al layer was fcc. Both x-ray diffraction (XRD) and selected area electron diffraction (SAED) analysis confirmed the identity of these phases. Detection of fcc-Ti in as-deposited the Ti/Al multilayer thin film by XRD established that the fcc-Ti phase is not an artifact of TEM sample preparation, as have been envisaged by some of the previous researchers. The fcc-Ti phase appeared when dual rf guns were used for Ti deposition and the diffraction peak intensity corresponding to fcc phase increased when the gun power was raised. A modified equation of state based thermodynamic analysis confirmed that the formation of hcp phase as opposed to the thermodynamically stable fcc phase of pure Ti is due to crystallite size reduction and not impurity driven.
Bera Supriya
Dasgupta Arup
Dash Sitaram
Divakar Ramachandran
Manna Indranil
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