Fabrication of surface-patterned ZnO thin films using sol-gel methods and nanoimprint lithography

Details Fabrication of surface-patterned ZnO thin films using sol-gel methods and nanoimprint lithography Fabrication of surface-patterned ZnO thin films using sol-gel methods and nanoimprint lithography

2011-08-19

arxiv.org/abs/1108.3894v1

Physics

Condensed Matter

Materials Science

17 pages, 5 figures; Published in Journal of Sol-Gel Science and Technology, 2011

Scientific paper

10.1007/s10971-011-2545-1

Surface-patterned ZnO thin films were fabricated by direct imprinting on ZnO sol and subsequent annealing process. The polymer-based ZnO sols were deposited on various substrates for the nanoimprint lithography and converted to surface-patterned ZnO gel films during the thermal curing nanoimprint process. Finally, crystalline ZnO films were obtained by subsequent annealing of the patterned ZnO gel films. The optical characterization indicates that the surface patterning of ZnO thin films can lead to an enhanced transmittance. Large-scale ZnO thin films with different patterns can be fabricated by various easy-made ordered templates using this combination of sol-gel and nanoimprint lithography techniques.

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