Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates

Details Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates

2010-08-19

arxiv.org/abs/1008.3325v3

Physics

Condensed Matter

Superconductivity

Scientific paper

We fabricated superconducting MgB2 thin films on (001) MgO substrates. The samples were prepared by magnetron rf and dc co-sputtering on heated substrates. They were annealed ex-situ for one hour at temperatures between 450{\deg}C and 750{\deg}C. We will show that the substrate temperature during the sputtering process and the post annealing temperatures play a crucial role in forming MgB2 superconducting thin films. We achieved a critical onset temperature of 27.1K for a film thickness of 30nm. The crystal structures were measured by x-ray diffraction.

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