Fabrication of One-Dimensional Programmable-Height Nanostructures via Dynamic Stencil Deposition

Details Fabrication of One-Dimensional Programmable-Height Nanostructures via Dynamic Stencil Deposition Fabrication of One-Dimensional Programmable-Height Nanostructures via Dynamic Stencil Deposition

2008-02-13

arxiv.org/abs/0802.1848v1

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

6 pages, 5 figures

Scientific paper

10.1063/1.2960573

Dynamic stencil deposition (DSD) techniques offer a variety of fabrication advantages not possible with traditional lithographic processing, such as the the ability to directly deposit nanostructures with programmable height profiles. However, DSD systems have not enjoyed widespread usage due to their complexity. We demonstrate a simple, low-profile, portable, one-dimensional nanotranslation system that facilitates access to nanoscale DSD abilities. Furthermore we show a variety of fabricated programmable-height nanostructures, including parallel arrays of such structures, and suggest other applications that exploit the unique capabilities of DSD fabrication methods.

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