Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography

Details Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography

2006-08-22

arxiv.org/abs/physics/0608216v1

Applied Optics, Vol. 44 (2005), pp. 6857-6860

Physics

Atomic Physics

4 pages, 3 figures

Scientific paper

10.1364/AO.44.006857

We present a novel method to mount and align an optical-fiber-based resonator on the flat surface of an atom chip with ultrahigh precision. The structures for mounting a pair of fibers, which constitute the fiber resonator, are produced by a spin-coated SU-8 photoresist technique by use of deep-UV lithography. The design and production of the SU-8 structures are discussed. From the measured finesses we calculate the coupling loss of the SU-8 structures acting as a kind of fiber splice to be smaller than 0.013 dB.

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