Evidence of potential sputtering of ultra-thin Pt films due to impact of multi-charged Ar ions

Details Evidence of potential sputtering of ultra-thin Pt films due to impact of multi-charged Ar ions Evidence of potential sputtering of ultra-thin Pt films due to impact of multi-charged Ar ions

2002-04-10

arxiv.org/abs/cond-mat/0204222v1

Physics

Condensed Matter

Materials Science

Scientific paper

10.1016/S0168-583X(03)01743-9

The phenomenon of potential sputtering of ultra-thin Pt films due to impact
of 20 keV highly charged $Ar^{q+}$ (q = 3 - 8) ions has been investigated. The
results show enhanced erosion of the Pt film with the increase of potential
energy of the Ar projectile.

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