Etching suspended superconducting hybrid junctions from a multilayer

Details Etching suspended superconducting hybrid junctions from a multilayer Etching suspended superconducting hybrid junctions from a multilayer

2011-11-15

arxiv.org/abs/1111.3541v1

Physics

Condensed Matter

Superconductivity

Scientific paper

A novel method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor - insulator - normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated.

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