Epitaxial Graphene Growth on SiC Wafers

Details Epitaxial Graphene Growth on SiC Wafers Epitaxial Graphene Growth on SiC Wafers

2009-07-29

arxiv.org/abs/0907.5031v1

ECS Trans. 19, 117 (2009)

Physics

Condensed Matter

Materials Science

215th Meeting of the Electrochemical Society, 8 pages, 8 figures

Scientific paper

10.1149/1.3119535

An in vacuo thermal desorption process has been accomplished to form epitaxial graphene (EG) on 4H- and 6H-SiC substrates using a commercial chemical vapor deposition reactor. Correlation of growth conditions and the morphology and electrical properties of EG are described. Raman spectra of EG on Si-face samples were dominated by monolayer thickness. This approach was used to grow EG on 50 mm SiC wafers that were subsequently fabricated into field effect transistors with fmax of 14 GHz.

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