Energy distribution of ion species in Ar/CH4, Ar/C2H2, and Ar/C3H6 radio-frequency plasmas

Details Energy distribution of ion species in Ar/CH4, Ar/C2H2, and Ar/C3H6 radio-frequency plasmas Energy distribution of ion species in Ar/CH4, Ar/C2H2, and Ar/C3H6 radio-frequency plasmas

Oct 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005aipc..799..375d&link_type=abstract

NEW VISTAS IN DUSTY PLASMAS: Fourth International Conference on the Physics of Dusty Plasmas. AIP Conference Proceedings, Volum

Physics

Dusty Plasmas, Plasma Diagnostics, High-Frequency Discharges, Argon, Organic Compounds, Emission, Absorption, And Scattering Of Electromagnetic Radiation, Dusty Or Complex Plasmas, Plasma Crystals, Plasma Diagnostic Techniques And Instrumentation, High-Frequency And Rf Discharges

Scientific paper

Molecule and particle formation in a capacitively coupled
radio-frequency discharge has been investigated. Formation of molecular
ions has been studied by means of plasma process monitoring employing
energy-dispersive mass spectrometry. In addition, the influence of dust
particles on the energy distribution of plasma ions was investigated.

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