Elucidation of microstructure of single-phase microcrystalline silicon based on crystallite size distributions

Details Elucidation of microstructure of single-phase microcrystalline silicon based on crystallite size distributions Elucidation of microstructure of single-phase microcrystalline silicon based on crystallite size distributions

2007-07-02

arxiv.org/abs/0707.0225v1

Physics

Condensed Matter

Materials Science

5 pages, 4 figures

Scientific paper

Highly crystallized undoped hydrogenated microcrystalline silicon films prepared using SiF4-H2 mixture plasma were investigated at various stages of growth employing different microstructural probes. Our self-consistent results elucidate various aspects of the evolution of film microstructure, compositional changes and variations in crystallite size distributions with film growth. Inclusion of a bimodal crystallite size distribution in microstructural data analysis leads to results that are corroborative with those obtained from other microstructural tools, and yields a more physically accurate and coherent description of microcrystalline silicon film microstructure.

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