Electron beam nanosculpting of suspended graphene sheets

Details Electron beam nanosculpting of suspended graphene sheets Electron beam nanosculpting of suspended graphene sheets

2008-08-21

arxiv.org/abs/0808.2974v2

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

Scientific paper

10.1063/1.2980518

We demonstrate high-resolution modification of suspended multi-layer graphene sheets by controlled exposure to the focused electron beam of a transmission electron microscope. We show that this technique can be used to realize, on timescales of a few seconds, a variety of features, including nanometer-scale pores, slits, and gaps that are stable and do not evolve over time. Despite the extreme thinness of the suspended graphene sheets, extensive removal of material to produce the desired feature geometries is found to not introduce long-range distortion of the suspended sheet structure.

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