Electrically Detected Magnetic Resonance Applied to the Study of Near Surface Electron Donors in Silicon

Details Electrically Detected Magnetic Resonance Applied to the Study of Near Surface Electron Donors in Silicon Electrically Detected Magnetic Resonance Applied to the Study of Near Surface Electron Donors in Silicon

2010-02-22

arxiv.org/abs/1002.4071v1

Physics

Condensed Matter

Materials Science

4 pages, 3 figures, 34th ANZIP condensed matter and materials meeting 2010

Scientific paper

Electrically detected magnetic resonance (EDMR) is applied to mm size devices
with implanted leads and a 50 micron square gap laid down on bulk phosphorus
doped silicon. Devices with a range of phosphorus concentrations and surface
types were prepared and measured to examine the interplay between donor and
charge trap states in producing EDMR signals.

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