Electret-based cantilever energy harvester: design and optimization

Details Electret-based cantilever energy harvester: design and optimization Electret-based cantilever energy harvester: design and optimization

2011-11-10

arxiv.org/abs/1111.2458v1

Proc. PowerMEMS 2010, pp.327-330

Physics

Classical Physics

Scientific paper

We report in this paper the design, the optimization and the fabrication of an electret-based cantilever energy harvester. We develop the mechanical and the electrostatic equations of such a device and its implementation using Finite Elements (FEM) and Matlab in order to get an accurate model. This model is then used in an optimization process. A macroscopic prototype (3.2cm^{2}) was built with a silicon cantilever and a Teflon\textregistered electret. Thanks to this prototype, we manage to harvest 17\muW with ambient-type vibrations of 0.2g on a load of 210M{\Omega}. The experimental results are consistent with simulation results.

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