Development of Bolometer Matrices with NbSi TES Sensors for the Study of the Cosmic Microwave Radiation (cmb)

Physics – Medical Physics

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Transition Edge Sensor (Tes), Electron-Phonon Coupling, Thermal Conductance, Sensitivity, Superconducting Transition

Scientific paper

We report results on NbxSi1-x transition edge sensor (TES) bolometers fabricated on 2-inch silicon wafers, using electron-beam coevaporation and photolithography techniques. The superconducting transition temperature can be adjusted by the Nb concentration x and the thickness of the NbxSi1-x thin film. For the samples described here the transition temperature is close to 100 mK. We have measured the resistance versus temperature of several sensors using different bias currents, ranging from 200 nA to 10 μA. The electron-phonon coupling coefficient is calculated herein. An electron-ph on on coupling model is built to describe the behavior of the NbSi TES sensors.

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