Development of an ultrahigh-precision x-ray optics

Details Development of an ultrahigh-precision x-ray optics Development of an ultrahigh-precision x-ray optics

Dec 2003

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2003spie.5169..268k&link_type=abstract

Astronomical Adaptive Optics Systems and Applications. Edited by Tyson, Robert K.; Lloyd-Hart, Michael. Proceedings of the SPI

Physics

Optics

1

Scientific paper

We are developing an ultra high precision Soft X-ray telescope. The design of the telescope is a normal incident one for 13.5 nm band using Mo/Si multilayers. Two ideas are introduced. One is the optical measurement system in order to monitor the precision of the optics system. The other is the adaptive optics system with a deformable mirror. Using an X ray-optical separation filter, we can always monitor the deformation of the optics by optical light. With this information, we can control the deformable mirror to compensate the system distortion as a closed loop system. We confirmed that the absolute precision of the wave front sensor was less than 3 nm rms. This is also confirmed that the determination of the image center of each micro lens can be ~1/100 of the pixel size. The precision of the deformable mirror was roughly 5 nm rms. Using the closed loop control the accuracy of the repeatability of the shape of the deformable mirror is less than 2 nm rms. The shape of the primary mirror was an off-axis paraboloide with an effective diameter of 80 mm. This primary mirror was coated by Mo/Si multilayers. The reflectivity of the primary mirror at 13.5 nm was ranging from 30 to 50%. The X ray-optical separation filter was made from Zr with a thickness of ~170 nm. The transmission of the filter for low energy X-ray measured and was roughly 50% at thickness of ~170 nm. The transmission of the filter for low energy X-ray was measured and was roughly 50% at 13.5 nm.

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