Physics – Optics
Scientific paper
Nov 2000
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4146...83w&link_type=abstract
Proc. SPIE Vol. 4146, p. 83-90, Soft X-Ray and EUV Imaging Systems, Winfried M. Kaiser; Richard H. Stulen; Eds.
Physics
Optics
Scientific paper
A method of designing multilayers with broadband wavelength responses for use as coatings in EUV optics at normal incidence is presented int his paper. The method is based on the well-known Fresnel equations and recursive calculation combined with a defined merit function, with random variation of the thickness of each layer. This allows the design of multilayers for specific requirements. The method was used to design Mo/Si multilayers with broadband wavelength responses for the EUV region, 18 - 20 nm. Such mirrors were made by magnetron sputtering in 99.99% pure argon. The deposition rates, after calibration, were 0.12 nms-1 for molybdenum and 0.07 nms-1 for silicon. The broadband multilayers were deposited on 30 mm diameter K9 glass substrates with rms surface roughnesses less than 0.8 nm.
Cao Jianlin
Chen Bin
Chen Xingdan
Kun Changjun
Ma Yueying
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