Physics – Condensed Matter – Mesoscale and Nanoscale Physics
Scientific paper
2007-12-17
J. Appl. Phys. 103, 113715 (2008)
Physics
Condensed Matter
Mesoscale and Nanoscale Physics
Scientific paper
10.1063/1.2937085
We extend quantum models of nanowire surface scattering to incorporate bulk resistivity and extract an expression for the increased resistivity due to surface roughness. To learn how to improve conductivity, we calculate conductivity degradation from individual wavelengths of surface roughness, and show how these can be convolved to give resistivity for arbitrary surfaces. We review measurements from Cu films and conclude that roughness at short wavelengths (less than 100 nm) dominates scattering, and that primarily specular scattering should be achievable for RMS roughness below about 0.7 nm.
Deng Rui
Dunham Scott T.
Feldman Baruch
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