Physics – Condensed Matter – Materials Science
Scientific paper
2010-09-23
Physics
Condensed Matter
Materials Science
16 pages, 6 figures, accepted for publication in Thin Solid Films
Scientific paper
Chromia (Cr2O3) has been extensively explored for the purpose of developing widespread industrial applications, owing to the convergence of a variety of mechanical, physical and chemical properties in one single oxide material. Various methods have been used for large area synthesis of Cr2O3 films. However, for selective area growth and growth on thermally sensitive materials, laser-assisted chemical vapour deposition (LCVD) can be applied advantageously. Here we report on the growth of single layers of pure Cr2O3 onto sapphire substrates at room temperature by low pressure photolytic LCVD, using UV laser radiation and Cr(CO)6 as chromium precursor. The feasibility of the LCVD technique to access selective area deposition of chromia thin films is demonstrated. Best results were obtained for a laser fluence of 120 mJ cm-2 and a partial pressure ratio of O2 to Cr(CO)6 of 1.0. Samples grown with these experimental parameters are polycrystalline and their microstructure is characterised by a high density of particles whose size follows a lognormal distribution. Deposition rates of 0.1 nm s-1 and mean particle sizes of 1.85 {\mu}m were measured for these films.
Conde O.
Silvestre A. J.
Sousa P. M.
No associations
LandOfFree
Cr2O3 thin films grown at room temperature by low pressure laser chemical vapour deposition does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Cr2O3 thin films grown at room temperature by low pressure laser chemical vapour deposition, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cr2O3 thin films grown at room temperature by low pressure laser chemical vapour deposition will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-339370