Physics – Condensed Matter – Materials Science
Scientific paper
2004-04-16
Appl. Phys. Lett. v84, p4047 (2004)
Physics
Condensed Matter
Materials Science
Typos corrected; to appear in Appl. Phys. Lett
Scientific paper
10.1063/1.1751612
We report the fabrication and electrical characterization of a single electron transistor in a modulation doped silicon/silicon-germanium heterostructure. The quantum dot is fabricated by electron beam lithography and subsequent reactive ion etching. The dot potential and electron density are modified by laterally defined side gates in the plane of the dot. Low temperature measurements show Coulomb blockade with a single electron charging energy of 3.2 meV.
Blick Robert H.
Chu Jack O.
Coppersmith Susan N.
Eriksson Mark A.
Friesen Mark
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