Physics – Condensed Matter – Superconductivity
Scientific paper
2004-06-25
Physics
Condensed Matter
Superconductivity
to bu published in Jpn. J. Appl. Phys., 43(7A) 2004
Scientific paper
10.1143/JJAP.43.4163
In fabricating $\mathrm{Bi_2Sr_2CaCu_2O_{8+\delta}}$ intrinsic Josephson junctions in 4-terminal mesa structures, we modify the conventional fabrication process by markedly reducing the etching rates of argon ion milling. As a result, the junction number in a stack can be controlled quite satisfactorily as long as we carefully adjust those factors such as the etching time and the thickness of the evaporated layers. The error in the junction number is within $\pm 1$. By additional ion etching if necessary, we can controllably decrease the junction number to a rather small value, and even a single intrinsic Josephson junction can be produced.
Ji Zheng-Ming
Kang Lin
Wu Pei-Heng
Xu Wei-Wei
You Li-Xing
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