Composition, structure, and luminescent properties of SiOxNy(Si) composite layers containing Si nanocrystals

Details Composition, structure, and luminescent properties of SiOxNy(Si) composite layers containing Si nanocrystals Composition, structure, and luminescent properties of SiOxNy(Si) composite layers containing Si nanocrystals

2005-11-24

arxiv.org/abs/cond-mat/0511602v1

Physics

Condensed Matter

Materials Science

Scientific paper

A relationship between the chemical composition, structure and luminescent properties of light-emitting SiOxNy(Si) composite layers with Si nanocrystals is demonstrated. Photoluminescence (PL) with a maximum of intensity at 500-600 nm is observed in a narrow region of chemical compositions with relatively small Si excess (about 10 at. %). Composite layers structure is studied by means of HRTEM. Appearance of nanocrystals due to annealing is accompanied by substantial growth (30-40 times) of PL intensity but do not change PL spectra shape. Chemical composition of structural luminescent-active complexes with excess Si atomes is determined by XPS technique.

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