Characterization of Mo/B4C soft x-ray multilayer mirrors for 7.3- to 8.0-nm radiation

Details Characterization of Mo/B4C soft x-ray multilayer mirrors for 7.3- to 8.0-nm radiation Characterization of Mo/B4C soft x-ray multilayer mirrors for 7.3- to 8.0-nm radiation

Nov 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3444..652l&link_type=abstract

Proc. SPIE Vol. 3444, p. 652-655, X-Ray Optics, Instruments, and Missions, Richard B. Hoover; Arthur B. Walker; Eds.

Physics

Optics

Scientific paper

Mo/B(subscript 4)C is chosen for the materials of the multilayer mirrors for 7.3nm and 8.0nm. The structural parameter has been designed and the mirrors has been fabricated by magnetron sputtering. Details in the microstructure of Mo/B(subscript 4)C multilayer were revealed using x-ray diffraction and TEM. The period thickness of each mirrors can be determined from the curve of x-ray diffraction, and they are 3.74nm and 4.12nm, respectively, which are in good agreement with the design parameters.

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