Calibration of shielded microwave probes using bulk dielectrics

Details Calibration of shielded microwave probes using bulk dielectrics Calibration of shielded microwave probes using bulk dielectrics

2008-09-24

arxiv.org/abs/0809.4247v1

Appl. Phys. Lett. 93, 123105 (2008)

Physics

Condensed Matter

Materials Science

10 pages, 3 figures

Scientific paper

10.1063/1.2990638

A stripline-type near-field microwave probe is microfabricated for microwave impedance microscopy. Unlike the poorly shielded coplanar probe that senses the sample tens of microns away, the stripline structure removes the stray fields from the cantilever body and localizes the interaction only around the focused-ion beam deposited Pt tip. The approaching curve of an oscillating tip toward bulk dielectrics can be quantitatively simulated and fitted to the finite-element analysis result. The peak signal of the approaching curve is a measure of the sample dielectric constant and can be used to study unknown bulk materials.

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