Broadband dielectric microwave microscopy on $μ$m length scales

Details Broadband dielectric microwave microscopy on $μ$m length scales Broadband dielectric microwave microscopy on $μ$m length scales

2007-02-25

arxiv.org/abs/cond-mat/0702573v1

Rev. Sci. Instrum. 78, 044701 (2007)

Physics

Condensed Matter

Materials Science

19 pages (preprint format), 5 figures; to be published in Review of Scientific Instruments

Scientific paper

10.1063/1.2719613

We demonstrate that a near-field microwave microscope based on a transmission line resonator allows imaging in a substantially wide range of frequencies, so that the microscope properties approach those of a spatially-resolved impedance analyzer. In the case of an electric probe, the broadband imaging can be used in a direct fashion to separate contributions from capacitive and resistive properties of a sample at length scales on the order of one micron. Using a microwave near-field microscope based on a transmission line resonator we imaged the local dielectric properties of a Focused Ion Beam (FIB) milled structure on a high-dielectric-constant Ba_{0.6}Sr_{0.4}TiO_3 (BSTO) thin film in the frequency range from 1.3 GHz to 17.4 GHz. The electrostatic approximation breaks down already at frequencies above ~10 GHz for the probe geometry used, and a full-wave analysis is necessary to obtain qualitative information from the images.

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