Blowing of polysilicon fuses

Details Blowing of polysilicon fuses Blowing of polysilicon fuses

2011-03-22

arxiv.org/abs/1103.4303v1

Appl. Phys. Lett. 97, 023502 (2010);

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

3 pages, 4 figures, 1 table

Scientific paper

10.1063/1.3457469

Polysilicon fuses are one time programmable memory elements which allow the calibration of integrated circuits at wafer and package level. We present a zero dimensional lumped parameter model of the programming of fuses made from a combination of tungsten silicide and polycrystalline silicon. The components of the model are an electrical model, a thermal model and a flow model. The electrical model describes the temperature and geometry dependent resistance of the fuse. The thermal model describes the heating and melting of the fuse and its surroundings. The flow model describes the disconnection of the fuse by electromigration driven flow of silica. The model generates quantitatively accurate results and reproduces trends with applied voltage and fuse size.

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