Physics – Condensed Matter – Materials Science
Scientific paper
2009-08-25
Physics
Condensed Matter
Materials Science
9 pages, 4 figures
Scientific paper
Using isothermal and temperature-dependent electrical measurements, we investigated the resistive switching mechanism of amorphous titanium oxide thin films deposited by a plasma-enhanced atomic layer deposition method between two aluminum electrodes. We found a bipolar resistive switching behavior in the high temperature region (> 140 K), and two activation energies of shallow traps, 0.055 eV and 0.126 eV in the ohmic current regime. We also proposed that the bipolar resistive switching of amorphous TiO2 thin films is governed by the transition of conduction mode from a bulk-limited SCLC model (Off state) to an interface-limited Schottky emission (On state), generated by the ionic movement of oxygen vacancies.
Choi Sung-Yool
Jeong Hu Young
Lee Jeong Yong
Ryu Min-Ki
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