Bessel beam based optical profilometry

Details Bessel beam based optical profilometry Bessel beam based optical profilometry

Oct 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5964..171b&link_type=abstract

Advances in Optical Thin Films II. Edited by Amra, Claude; Kaiser, Norbert; Macleod, H. Angus. Proceedings of the SPIE, Volume

Physics

Scientific paper

We present our results of the development of some schemes for nondestructive optical profilometry of cylindrically shaped surfaces by using spatially matched conical light beams. A theoretical model is elaborated which describes profilometers with Bessel beams. A special feature of the profilometers proposed is the possibility to control their sensitivity and resolution. To this end, a scheme of tuning the cone angle of the Bessel beam over a wide range is incorporated. The operation regime of the profilometers is characterized by a nonzero spatial frequency of output signal. It allow us to apply a new algorithm for the interpretation of the output signal. This algorithm consists in the calculation of the azimuth spectrum which characterizes the deviation of tested profiles from the circular ones.

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