Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation

Details Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation

2006-01-19

arxiv.org/abs/physics/0601143v1

Proc. SPIE Vol. 5992 (2005) 599216, (25th Annual BACUS Symposium on Photomask Technology, J. T. Weed, P. M. Martin, Eds.)

Physics

Optics

12 pages, 8 figures (see original publication for images with a better resolution)

Scientific paper

10.1117/12.631696

An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was proven by examining a set of typical problems and by a benchmarking against two established methods (FDTD and a differential method) and an analytical example. The new finite element approach was up to 100 times faster than the competing approaches for moderate target accuracies, and it was the only method which allowed to reach high target accuracies.

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