4. Physics
  5. Optics

C. Nölscher

Physics – Optics

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3D Simulations of Electromagnetic Fields in Nanostructures using the Time-Harmonic Finite-Element Method

Physics – Optics
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Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation

Physics – Optics
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Electromagnetic Field Simulations of Isolated and Periodic 3D Photomask Patterns

Physics – Optics
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Rigorous Simulation of 3D Masks

Physics – Optics
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