Physics – Classical Physics
Scientific paper
2007-09-19
Materials Research Society Symposia Proceedings (2006) 7
Physics
Classical Physics
Scientific paper
This paper outlines the issues related to RF MEMS packaging and low actuation voltage. An original approach is presented concerning the modeling of capacitive contacts using multiphysics simulation and advanced characterization. A similar approach is used concerning packaging development where multi-physics simulations are used to optimize the process. A devoted package architecture is proposed featuring very low loss at microwave range.
Achkar Hikmat
Aubert Hervé
Coccetti Fabio
Pennec Fabienne
Peyrou David
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