Physics – Condensed Matter – Materials Science
Scientific paper
2007-08-10
Dans European Nano Systems Worshop - ENS 2006, Paris : France (2006)
Physics
Condensed Matter
Materials Science
Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
Scientific paper
Deposition of clusters from the gas phase is becoming an enabling technology for the production of nanostructured devices. Supersonic clusters beam deposition (SCBD) has been shown as a viable route for the production of nanostructured thin films. By using SCBD and by exploiting aerodynamical effects typical of supersonic beams it is possible to obtain very high deposition rates with a control on neutral cluster mass distribution, allowing the deposition of thin films with tailored nanostructure. Due to high deposition rates, high lateral resolution, low temperature processing, SCBD can be used for the integration of cluster-assembled films on micro- and nanofabricated platforms with limited or no post-growth processing. Here we present the industrial opportunities for batch fabrication of gas sensor microarrays based on transition metal oxide nanoparticles deposited on microfabricated substrates.
Bandiera D.
Barborini E.
Bertolini G.
Ducati C.
Garibbo A.
No associations
LandOfFree
Batch fabrication of cluster assembled microarrays for chemical sensing does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Batch fabrication of cluster assembled microarrays for chemical sensing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Batch fabrication of cluster assembled microarrays for chemical sensing will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-47069